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文献求助+Resistive heater element made of highly durable TaC-coated graphite ...

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发表于 2020-1-14 15:02:26 | 显示全部楼层 |阅读模式
作者:Nakamura, D., Narita, T., & Kimura, T. (2019).
文献名称:Resistive heater element made of highly durable TaC-coated graphite for high-temperature and highly corrosive processes: Application to MOCVD GaN epitaxial growth.
期刊:Japanese Journal of Applied Physics.
doi:10.7567/1347-4065/ab2935


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发表于 2020-1-14 16:02:12 | 显示全部楼层
Resistive heater element made of highly durable TaC-coated graphite for high-temperature and highly corrosive processes Application to MOCVD GaN epitaxial growth Resistive heater element made of highly durable TaC-coated graphite for high-tem.pdf (1.38 MB, 下载次数: 1)
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